Abstract:
On-chip EM modeling at mm-wave frequencies
requires design methods that incorporate the layout and
verification macros of IC EDA tools with parameterized EM
CAD. We propose a novel, flexible design flow for 3D EM
modeling of BEOL structures that allows for parameterized
design of BEOL structures using Pcell elements as seed, thereby
reducing the time required to generate the full simulation model
in EM CAD. The method is illustrated by the co-design of a 94
GHz directional coupler.
