Structural and mechanical properties of tantalum thin films ected by nitrogen ion implantation
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Date
Authors
Ramezani, A.H.
Hoseinzadeh, Siamak
Ebrahiminejad, Zh.
Journal Title
Journal ISSN
Volume Title
Publisher
World Scientific Publishing
Abstract
Please read abstract in the article.
Description
Keywords
Ion implantation, X-ray diffraction (XRD), Tantalum, Atomic force microscopy (AFM), Friction coefficient, Microhardness, Scanning electron microscopy (SEM)
Sustainable Development Goals
SDG-03: Good health and well-being
SDG-04: Quality education
SDG-09: Industry, innovation and infrastructure
SDG-12: Responsible consumption and production
SDG-13: Climate action
SDG-04: Quality education
SDG-09: Industry, innovation and infrastructure
SDG-12: Responsible consumption and production
SDG-13: Climate action
Citation
Ramezani, A.H., Hoseinzadeh, S. & Ebrahiminejad, Zh. 2020, 'Structural and mechanical properties of tantalum thin films ected by nitrogen ion implantation', Modern Physics Letters B, vol. 34, no. 15, art. 2050163.