Effect of heat treatment on the migration behaviour of selenium implanted into polycrystalline SiC

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Authors

Abdalla, Zaki Adam Yousif
Ismail, Mahjoub Yagoub Abdalla
Njoroge, Eric Gitau
Wendler, E.
Malherbe, Johan B.
Hlatshwayo, Thulani Thokozani

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Elsevier

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Keywords

Ion implantation, Polycrystalline SiC, Recrystallization, Diffusion, Silicon carbide (SiC)

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Citation

Abdalla, Z.A.Y., Ismail, M.Y.A., Njoroge, E.G. et al. 2021, 'Effect of heat treatment on the migration behaviour of selenium implanted into polycrystalline SiC', Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 487, pp. 30-37, doi : 10.1016/j.nimb.2020.08.022.