Room temperature and high-pressure-pulsed laser deposition of nanocrystalline VO2 thin films on glass substrate : plasma and film analyses
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Date
Authors
Lafane, Slimane
Malek, Smail
Nel, Jacqueline Margot
Abdelli-Messaci, Samira
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Publisher
Springer
Abstract
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Keywords
Pulsed laser deposition, Nanocrystalline vanadium dioxide, Room temperature, High oxygen pressure, Plasma diagnostics
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Citation
Lafane, S., Malek, S., Nel, J. et al. Room temperature and high-pressure-pulsed laser deposition of nanocrystalline VO2 thin films on glass substrate: plasma and film analyses. Applied Physics A 127, 75 (2021). https://doi.org/10.1007/s00339-020-04174-1.