Electrical characterization of defects in heavy-ion implanted n-type Ge

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Authors

Auret, Francois Danie
Janse van Rensburg, Pieter Johan
Hayes, M.
Nel, Jacqueline Margot
Coelho, Sergio M.M.
Meyer, Walter Ernst
Decoster, S.
Matias, V.S.
Vantomme, A.
Smeets, D.

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Elsevier

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Keywords

Implantation, Electronic defects

Sustainable Development Goals

Citation

Auret, FD, Janse van Rensburg, PJ, Hayes, M, Nel, JM, Coelho, S, Meyer, WE, Decoster, S, Matias, V, Vantomme, A & Smeets, D 2007, ‘Electrical characterization of defects in heavy-ion implanted n-type Ge’, Nuclear Instruments and Methods in Physics Research Section B : Beam Interactions with Materials and Atoms, vol.257, issues 1-2, pp. 169-171.[http://www.sciencedirect.com/science/journal/0168583X]