Bulk antimony (Sb) doped germanium (n-Ge) samples with doping concentrations ranging between
7.0 1014 cm 3 and 2.5 1015 cm 3 were exposed to a dc-hydrogen or helium plasma. Hydrogen
exposure resulted in the introduction of a single prominent defect level at EC 0.31 eV. Exposing
similar samples to He plasmas introduced the same electron trap. The trap concentration increased
linearly with dopant concentration suggesting that Sb may be a component of this plasma-induced
trap. Thermal annealing kinetics studies suggested that this defect anneals out by diffusion.