Inductively coupled plasma induced deep levels in epitaxial n-GaAs

dc.contributor.authorVenter, Andre
dc.contributor.authorNyamhere, Cloud
dc.contributor.authorBotha, J.R.
dc.contributor.authorAuret, Francois Danie
dc.contributor.authorJanse van Rensburg, Pieter Johan
dc.contributor.authorMeyer, Walter Ernst
dc.contributor.authorCoelho, Sergio M.M.
dc.contributor.authorKolkovsky, V.I.
dc.date.accessioned2012-05-28T06:36:19Z
dc.date.available2012-05-28T06:36:19Z
dc.date.issued2012-05
dc.description.abstractThe electronic properties of defects introduced by low energy inductively coupled Ar plasma etching of n-type (Sidoped)GaAs were investigated by deep level transient spectroscopy (DLTS) and Laplace DLTS. Several prominent electron traps (Ec—0.046 eV, Ec—0.186 eV, Ec—0.314 eV. Ec—0.528 eV and Ec—0.605 eV) were detected.The metastable defect Ec—0.046eV having a trap signature similar to E1 is observed for the first time. Ec—0.314eV and Ec—0.605 eV are metastable and appear to be similar to the M3 and M4 defects present in dc H-plasma exposed GaAs.en
dc.description.librariannf2012en
dc.description.sponsorshipSouth African National Research Foundationen_US
dc.description.urihttp://www.elsevier.com/locate/physben_US
dc.identifier.citationF.D. Auret, P.J. Janse van Rensburg, W.E. Meyer, S.M.M. Coelho, Vl. Kolkovsky & J.R. Botha, 'Inductively coupled plasma induced deep levels in epitaxial n-GaAs, Physica B, vol. 407, no. 10, pp. 1497-1500 (2012), doi:10.1016/j.physb.2011.09.070en
dc.identifier.issn0921- 4526 (print)
dc.identifier.issn1873-2135 (online)
dc.identifier.other10.1016/j.physb.2011.09.070
dc.identifier.urihttp://hdl.handle.net/2263/18923
dc.language.isoenen_US
dc.publisherElsevieren_US
dc.rights© 2011 Elsevier. All rights reserved.en_US
dc.subjectGaAsen
dc.subjectActivation energyen
dc.subjectMetastabilityen
dc.subjectInductively coupled Ar plasma etching (ICP)en
dc.subject.lcshDeep level transient spectroscopyen
dc.titleInductively coupled plasma induced deep levels in epitaxial n-GaAsen
dc.typePostprint Articleen

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