Ion beam effects of 26.0 MeV Cu7+ ions in thin metallic and insulating films during heavy ion ERDA measurements

dc.contributor.authorMavhungu, H.
dc.contributor.authorMsimanga, M.
dc.contributor.authorHlatshwayo, Thulani Thokozani
dc.date.accessioned2015-10-20T12:46:32Z
dc.date.issued2015-04
dc.description.abstractWe report on an investigation carried out to determine effects of the probing beam on the structure of typical metallic and insulating thin films during Elastic Recoil Detection Analysis (ERDA) using a heavy ion beam. Metallic niobium nitride (NbN) and insulating calcium fluoride (CaF2) thin films (used as test samples) were irradiated by 26.0 MeV 63Cu7+ ions to fluences of 1.70 1014 ions/cm2 and 2.70 1014 ions/cm2, respectively. The effects of irradiation on the structural properties of the films were studied using Rutherford Backscattering Spectrometry (RBS), X-ray diffraction (XRD) and Atomic Force Microscopy (AFM). RBS results showed a significant (18%) reduction in the thickness of the CaF2 film due to electronic sputtering compared to only 1% reduction in the NbN film. XRD results showed no significant peak shifts in both films, but rather formation of unidentified peaks in the insulating film. AFM results indicated a substantial decrease in the average surface roughness of the insulating film and only a nominal increase in that of the metallic film. Results of electronic sputtering yield measurements carried out by ERDA are explained in terms of both the Coulomb explosion and the inelastic thermal spike models.en_ZA
dc.description.embargo2016-04-30
dc.description.librarianhb2015en_ZA
dc.description.sponsorshipNECSA, Tshwane University of Technology, University of Pretoria and iThemba LABS Gauteng.en_ZA
dc.description.urihttp://www.elsevier.com/locate/nimben_ZA
dc.identifier.citationMavhungu, H, Msimanga, M & Hlatshwayo, T 2015, 'Ion beam effects of 26.0 MeV Cu7+ ions in thin metallic and insulating films during heavy ion ERDA measurements', Nuclear Instruments and Methods in Physics Research, Section B : Beam Interactions with Materials and Atoms, vol. 349, pp. 79-84.en_ZA
dc.identifier.issn0168-583X (print)
dc.identifier.issn1872-9584 (online)
dc.identifier.other10.1016/j.nimb.2015.02.047
dc.identifier.urihttp://hdl.handle.net/2263/50260
dc.language.isoenen_ZA
dc.publisherElsevieren_ZA
dc.rights© 2015 Elsevier B.V. All rights reserved. Notice : this is the author’s version of a work that was accepted for publication in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. A. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 349, pp. 79-84, 2015. doi : 10.1016/j.nimb.2015.02.047.en_ZA
dc.subjectThin filmen_ZA
dc.subjectHeavy Ion ERDAen_ZA
dc.subjectIon beam damageen_ZA
dc.subjectElectronic sputteringen_ZA
dc.subjectIon beam analysisen_ZA
dc.subjectElastic recoil detection analysis (ERDA)en_ZA
dc.titleIon beam effects of 26.0 MeV Cu7+ ions in thin metallic and insulating films during heavy ion ERDA measurementsen_ZA
dc.typePostprint Articleen_ZA

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