A study of laser induced and other similar periodic surface structures using optical techniques

Abstract

In this study light scattering from periodically structured surfaces is investigated theoretically and experimentally. A mathematical model is developed which describes the diffraction characteristics of two examples of such surfaces, namely the regular grating-like micro structure on scales of the wing of the Trichoplusia orichalcea moth, and the laser induced periodic surface (LIPS) structures formed on the surface of a semiconductor during irradiation by a pulsed high-power laser. Predictions from these models are compared with experimental measurements using a conventional spectrometer (for the moth wing) and a novell ellipsometer-based technique (for LIPS).