Danga, Helga Tariro; Auret, Francois Danie; Tunhuma, Shandirai Malven; Omotoso, Ezekiel; Igumbor, Emmanuel; Meyer, Walter Ernst
(American Institute of Physics, 2019-06-03)
In this paper, we report on defects introduced in epitaxially grown n-type silicon (Si) during electron beam
exposure. The defects observed were electrically characterized using deep-level transient spectroscopy (DLTS) ...