A comparison of basic 94 GHz planar transmission line resonators in commercial BiCMOS back-end-of-line processes

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dc.contributor.other International Conference on Actual Problems of Electron Devices Engineering (APEDE), 2014: Saratov
dc.contributor.upauthor Stander, Tinus
dc.date.accessioned 2015-10-07T06:57:35Z
dc.date.available 2015-10-07T06:57:35Z
dc.date.issued 2014
dc.description Paper presented at the 2014 International Conference on Actual Problems of Electron Devices Engineering (APEDE), 25-26 Sept. 2014, Saratov. en_ZA
dc.description.abstract A comparative simulation study of planar 94 GHz resonators in a typical BiCMOS BEOL stack-up is presented, with the effect of chip passivation included. It is shown that Q-factors of between 3 and 15 can be obtained, depending on transmission medium and ground plane layer choice. Straight half-wavelength and shorted quarter-wavelength microstrip resonators are shown to outperform CPW, GCPW and hairpin resonators, with highest Q-factors obtained where the lowest available metallization layer is used as ground plane. Q-factors of above 10 may also be achieve in the absence of any ground plane in CPW, which may be implemented in processes (such as GaAs or GaN) where multiple metallization layers are not readily available. en_ZA
dc.description.librarian hb2015 en_ZA
dc.description.uri http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=6940442 en_ZA
dc.identifier.citation Stander, T 2014, 'A comparison of basic 94 GHz planar transmission line resonators in commercial BiCMOS back-end-of-line processes', 2014 International Conference on Actual Problems of Electron Devices Engineering (APEDE), 25-26 Sept. 2014, pp. 185-192. en_ZA
dc.identifier.isbn 978-1-4799-3437-9
dc.identifier.other 10.1109/APEDE.2014.6958743
dc.identifier.uri http://hdl.handle.net/2263/50170
dc.language.iso en en_ZA
dc.publisher Institute of Electrical and Electronics Engineers en_ZA
dc.rights © 2014 IEEE en_ZA
dc.subject Comparative simulation study en_ZA
dc.subject Planar 94 GHz resonators en_ZA
dc.subject Typical BiCMOS BEOL stack-up en_ZA
dc.title A comparison of basic 94 GHz planar transmission line resonators in commercial BiCMOS back-end-of-line processes en_ZA
dc.type Presentation en_ZA


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