Cobalt silicide formation on a Si(1 0 0) substrate in the presence of an interfacial (Fe90Zr10) interlayer

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dc.contributor.author Abrass, Hameda A.
dc.contributor.author Theron, C.C. (Chris)
dc.contributor.author Njoroge, E.G. (Eric)
dc.contributor.author Van der Berg, Nic (Nicolaas George)
dc.contributor.author Botha, A.J.
dc.contributor.author Yan, X- L.
dc.contributor.author Terblans, J.J.
dc.date.accessioned 2015-09-30T08:18:39Z
dc.date.issued 2015-09
dc.description.abstract The reaction between a thin film (126 nm) of Co and Si has been studied at 450 C for 24 h under high vacuum conditions, in the presence of a FeZr barrier layer. Without a diffusion barrier layer between Co and Si, Co2Si forms at 350 C as the initial phase while CoSi2 forms at 550 C. The FeZr barrier layer changed the flux of atoms arriving at the reaction interface. Co reacted with the Si from the substrate and formed a mixed layer of CoSi and CoSi2 in the interlayer region. The use of the FeZr diffusion barrier has been demonstrated to lower the temperature formation of CoSi2 to 450 C. The reactions were characterised by Rutherford backscattering spectrometry, Auger electron spectroscopy depth profiling, X-ray diffraction using CoKa radiation and scanning electron microscopy. en_ZA
dc.description.embargo 2016-09-30
dc.description.librarian hb2015 en_ZA
dc.description.uri http://www.elsevier.com/locate/nimb en_ZA
dc.identifier.citation Abrass, HA, Theron, CC, Njoroge, EG, Van Der Berg, NG, Botha, AJ, Yan, X-L & Terblans, JJ 2015, 'Cobalt silicide formation on a Si(1 0 0) substrate in the presence of an interfacial (Fe90Zr10) interlayer', Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, vol. 359, pp. 85-88. en_ZA
dc.identifier.issn 0168-583X (print)
dc.identifier.issn 1872-9584 (online)
dc.identifier.other 10.1016/j.nimb.2015.07.012
dc.identifier.uri http://hdl.handle.net/2263/50106
dc.language.iso en en_ZA
dc.publisher Elsevier en_ZA
dc.rights © 2015 Elsevier B.V. All rights reserved. Notice : this is the author’s version of a work that was accepted for publication in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. A. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol.359, pp. 85-88, 2015. doi : 10.1016/j.nimb.2015.07.012. en_ZA
dc.subject FeZr en_ZA
dc.subject Diffusion barrier en_ZA
dc.subject Reactions en_ZA
dc.subject Cobalt silicide en_ZA
dc.title Cobalt silicide formation on a Si(1 0 0) substrate in the presence of an interfacial (Fe90Zr10) interlayer en_ZA
dc.type Postprint Article en_ZA


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