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Ion implantation (4)
ZnO (2)
Amorphization (1)
Auger effect (1)
Auger electron spectroscopy (1)
Channeling (Physics) (1)
Channelling geometry (1)
Crystals (1)
Damage profiles (1)
Deep level transient spectroscopy (1)
Electron energy loss spectroscopy (1)
Electron spectroscopy (1)
Electronic defects (1)
Germanium -- Defects (1)
Heavy ions (1)
Implantation (1)
Ion bombardment (1)
Polar faces (1)
Radiation damage (1)
Rutherford backscattering spectrometry (1)
Silicon (1)
Zinc oxide (1)
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