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Annealing (2)
Rutherford backscattering spectrometry (RBS) (2)
Scanning electron microscopy (SEM) (2)
Silicon carbide (SiC) (2)
A-carbon (1)
Carbon (1)
Free carbon (1)
Grazing incidence X-ray diffraction (GIXRD) (1)
Heavy ions (1)
Interface (1)