Browsing Natural and Agricultural Sciences by UP Author "Janse van Rensburg, Pieter Johan"

Browsing Natural and Agricultural Sciences by UP Author "Janse van Rensburg, Pieter Johan"

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  • Unexpected properties of the inductively coupled plasma induced defect in germanium 
    Coelho, Sergio M.M.; Auret, Francois Danie; Janse van Rensburg, Pieter Johan; Nel, J.M. (Elsevier, 2014-04)
    Inductively coupled plasma (ICP) etching of germanium introduces a single defect, the E0.31 electron trap, for a large range of argon partial pressures from 4 × 10-3 to 6.5 × 10-4mbar that correspond to ion energies of 8 ...