Venter, Andre; Nyamhere, Cloud; Botha, J.R.; Auret, Francois Danie; Janse van Rensburg, Pieter Johan; Meyer, Walter Ernst; Coelho, Sergio M.M.; Kolkovsky, V.I.
(Elsevier, 2012-05)
The electronic properties of defects introduced by low energy inductively coupled Ar plasma etching of n-type (Sidoped)GaAs were investigated by deep level transient spectroscopy (DLTS) and Laplace
DLTS. Several prominent ...