Browsing Research Articles (Electrical, Electronic and Computer Engineering) by Subject "Eectron beam deposition (EBD)"
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Browsing Research Articles (Electrical, Electronic and Computer Engineering) by Subject "Eectron beam deposition (EBD)"
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(American Institute of Physics, 2019-06-03)In this paper, we report on defects introduced in epitaxially grown n-type silicon (Si) during electron beam exposure. The defects observed were electrically characterized using deep-level transient spectroscopy (DLTS) ...
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