Van Laar, Jean H.; Bissett, H.; Barry, J.C.; Van der Walt, I.J.; Crouse, Philippus L.
(Elsevier, 2018-04)
Silicon carbide (SiC) layers were deposited onto alumina particles in a microwave plasma-assisted spouted bed reactor using methyltrichlorosilane (MTS) and hydrogen mixtures, in argon, as precursor gas feed. The operating ...