Browsing Research Articles (Chemical Engineering) by Subject "Field emission scanning electron microscopy (FE-SEM)"
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Browsing Research Articles (Chemical Engineering) by Subject "Field emission scanning electron microscopy (FE-SEM)"
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(Elsevier, 2017-12)ZrC layers were deposited in a chemical vapour deposition (CVD) reactor on graphite substrates using a ZrCl4-Ar-CH4-H2 precursor mixture. The deposition was conducted at different ZrCl4 partial pressures at a constant ...
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