Browsing Research Articles (Chemical Engineering) by Subject "Etching"

Browsing Research Articles (Chemical Engineering) by Subject "Etching"

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  • Controlled etching of the SiC layer in TRISO coated particles using CF4 in a non-thermal plasma 
    Koen, Reiner; Van der Walt, Isak; Jansen, Arnold Alexander; Crouse, Philippus L. (AOSIS Open Journals, 2020-04-03)
    The fluorine radicals generated in a CF4 non-equilibrium RF plasma readily react with silicon carbide (SiC) forming volatile SiF4 and CF4. In a spouted-bed configuration this enables the complete removal of the SiC layer ...
  • Treatment of TRISO-coated particles with CF4 in a low temperature plasma 
    Van der Walt, Izak Jacobus; Nel, Johannes T.; Crouse, Philippus L.; Jansen, Arnold Alexander; Kekana, Sipho J. (Elsevier, 2011-06)
    An alternative recovery method to the mechanical crushing of off-specification tri-structural-isotropic (TRISO) coated fuel microspheres is demonstrated. It is shown that the inert SiC layer can be completely removed by ...