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Browsing Research Articles (Chemical Engineering) by Author "Koen, Reiner"

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Controlled etching of the SiC layer in TRISO coated particles using CF4 in a non-thermal plasma

Koen, Reiner; Van der Walt, Isak; Jansen, Arnold Alexander; Crouse, Philippus L. (AOSIS Open Journals, 2020-04-03)

The fluorine radicals generated in a CF4 non-equilibrium RF plasma readily react with silicon carbide (SiC) forming volatile SiF4 and CF4. In a spouted-bed configuration this enables the complete removal of the SiC layer ...

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