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Browsing Chemical Engineering by Subject "Partial pressure"

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The role of ZrCl4 partial pressure on the growth characteristics of chemical vapour deposited ZrC layers

Biira, Saphina; Crouse, Philippus L.; Hlatshwayo, Thulani Thokozani; Njoroge, Eric Gitau; Nel, J.T.; Ntsoane, Tshepo Paul; Malherbe, Johan B. (Elsevier, 2017-12)

ZrC layers were deposited in a chemical vapour deposition (CVD) reactor on graphite substrates using a ZrCl4-Ar-CH4-H2 precursor mixture. The deposition was conducted at different ZrCl4 partial pressures at a constant ...

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