Koen, Reiner; Van der Walt, Isak; Jansen, Arnold Alexander; Crouse, Philippus L.(AOSIS Open Journals, 2020-04-03)
The fluorine radicals generated in a CF4 non-equilibrium RF plasma readily react with silicon carbide (SiC) forming volatile SiF4 and CF4. In a spouted-bed configuration this enables the complete removal of the SiC layer ...
