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Deep level transient spectroscopy (12)
Defects (7)
DLTS (5)
Diodes, Schottky-barrier (4)
Germanium (3)
Electron beams (2)
Germanium -- Defects (2)
Implantation (2)
Laplace transformation (2)
Plasma etching (2)
Temperature measurements (2)
Alpha rays (1)
Alpha-particle irradiation (1)
Annealing (1)
Annealing of metals (1)
Ar plasma etching (1)
Barrier height (1)
Capacitance meters (1)
Diodes, Semiconductor (1)
DLTS (Spectroscopy) (1)
Dry etch (1)
e-Centers (1)
Electron beam deposition (1)
Electron irradiation (1)
Electronic defects (1)
Electrons -- Emission (1)
GaN (1)
Ge (1)
Heavy ions (1)
High resolution Laplace DLTS (1)
ICP (1)
Ion implantation (1)
L-DLTS (1)
Laplace (high-resolution) DLTS (1)
Laplace DLTS (1)
Metallization (1)
Metallizing (1)
N-type Ge (1)
Pulsed laser deposition (1)
Rare-earth (1)
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