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Ion implantation (5)
Diffusion (3)
Polycrystalline SiC (2)
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Rutherford backscattering spectroscopy (RBS) (1)
SHI irradiation (1)
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Sp3 hybridization (1)
Swift heavy ions (SHI) (1)
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Vanadium dioxide (1)
Very high temperature gas cooled reactors (VHTGRs) (1)
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