Investigating the impact of physical vapour deposition of palladium on electron-irradiated silicon substrates

Abstract

This study reports on the effect of resistive physical vapour deposition of Pd Schottky contacts on the defects observed in an irradiated n-type Si substrate. Deep-level transient spectroscopy (DLTS) was used in order to investigate the possible defects in Schottky diodes on the n-type Si. In this study the defects present where the diode was deposited first and then irradiated (“post irradiated”) were compared to those present where the substrate was irradiated first, and the Pd deposited after irradiation (“pre-irradiated”). In the post-irradiated material, the familiar radiation-induced defects were observed. However, in the pre-irradiated material, fourteen new defects were observed, with DLTS signatures differing from those of the defects in the post-irradiated diodes. The newly identified defects seemed to be specifically caused by the deposition of Pd contacts after irradiation of the substrate, as these defects were not observed when other metals such as Au, Ni, Al and Ag were deposited after irradiation. In this paper, we will refer to the observed effect that Pd deposition replaced the familiar radiation-induced defects in Si with the new set of defects as the “Pd effect”. Careful experiments ruled out annealing due to inadvertent heating of the sample during deposition as a possible cause. Care was taken to avoid all sources of contamination: The effect was observed for different sources of Pd and crucibles. This effect was inhibited by the presence of a thin intermediate layer of Pd or Au deposited before irradiation. We therefore conclude that the effect is only observed when Pd is deposited directly onto the irradiated Si surface. Out of the fourteen newly observed defects, four defects, with activation energy of 182, 220, 360 and 607 meV, had DLTS signatures corresponding to those of defects previously observed in Pd-containing Si. For the rest of the defects, no defects with similar DLTS signatures were found in literature. We therefore believe that the defects observed are produced by defect enhanced diffusion of Pd. Overall, the study enhances our understanding of defect behaviour in silicon-based devices, particularly under irradiation and metal deposition conditions, and reveals the unique properties and effects of Pd.