Abstract:
Analyzing diamond nanocrystal (DNC) thin film morphology produced by the HFCVD technique is the main objective of the present work. Stereometric analysis of three-dimensional surface microtextures was carried out based on data obtained through atomic force microscopy (AFM), while the ISO 25178-2:2012 standard was applied to characterize surface topography. The Abbott–Firestone curve, peak count histograms, and Cartesian graphs, which were extracted through AFM images, gave valuable statistical information. As can be seen, the most isotropic sample was the Au catalyst (etched) deposited by the hot filament chemical vapor deposition method. Moreover, by increasing the time of DNC growth from 15 min to 60 min, the surface roughness was increased. In addition, the average power spectral density was calculated and furrows were determined for all samples.
