Tunhuma, Shandirai Malven; Auret, Francois Danie; Legodi, Matshisa Johannes; Diale, M. (Mmantsae Moche)
(Elsevier, 2018-07)
We have studied the defects introduced in n-type 4H-SiC during sputter deposition of tungsten using deep-level transient spectroscopy (DLTS). Current-voltage and capacitance-voltage measurements showed a deterioration of ...