Abstract:
In this paper, we report the effect of soda lime substrate deposition temperature (Ts) on the crystal structure and
the metal insulator transition of VO2 thin films. Samples were deposited at substrate deposition temperature
ranging from 450 to 600 0C by pulsed-laser deposition and characterized by x-ray diffraction and UV-VIS
spectrophotometer. At a substrate temperature of 550°C, the VO2 (100) reflection dominate the spectrum
showing a change in crystalline grains orientation. The highest transition temperatures of 74 oC with the lowest
hysteresis width of 11 oC were obtained on the same sample grown at a substrate deposition temperature of 500
oC and also corresponding to the largest grains size of a value of 350 nm.
