Ion beam effects of 26.0 MeV Cu7+ ions in thin metallic and insulating films during heavy ion ERDA measurements

Mavhungu, H.; Msimanga, M.; Hlatshwayo, Thulani Thokozani

dc.contributor.author	Mavhungu, H.
dc.contributor.author	Msimanga, M.
dc.contributor.author	Hlatshwayo, Thulani Thokozani
dc.date.accessioned	2015-10-20T12:46:32Z
dc.date.issued	2015-04
dc.description.abstract	We report on an investigation carried out to determine effects of the probing beam on the structure of typical metallic and insulating thin films during Elastic Recoil Detection Analysis (ERDA) using a heavy ion beam. Metallic niobium nitride (NbN) and insulating calcium fluoride (CaF2) thin films (used as test samples) were irradiated by 26.0 MeV 63Cu7+ ions to fluences of 1.70 1014 ions/cm2 and 2.70 1014 ions/cm2, respectively. The effects of irradiation on the structural properties of the films were studied using Rutherford Backscattering Spectrometry (RBS), X-ray diffraction (XRD) and Atomic Force Microscopy (AFM). RBS results showed a significant (18%) reduction in the thickness of the CaF2 film due to electronic sputtering compared to only 1% reduction in the NbN film. XRD results showed no significant peak shifts in both films, but rather formation of unidentified peaks in the insulating film. AFM results indicated a substantial decrease in the average surface roughness of the insulating film and only a nominal increase in that of the metallic film. Results of electronic sputtering yield measurements carried out by ERDA are explained in terms of both the Coulomb explosion and the inelastic thermal spike models.	en_ZA
dc.description.embargo	2016-04-30
dc.description.librarian	hb2015	en_ZA
dc.description.sponsorship	NECSA, Tshwane University of Technology, University of Pretoria and iThemba LABS Gauteng.	en_ZA
dc.description.uri	http://www.elsevier.com/locate/nimb	en_ZA
dc.identifier.citation	Mavhungu, H, Msimanga, M & Hlatshwayo, T 2015, 'Ion beam effects of 26.0 MeV Cu7+ ions in thin metallic and insulating films during heavy ion ERDA measurements', Nuclear Instruments and Methods in Physics Research, Section B : Beam Interactions with Materials and Atoms, vol. 349, pp. 79-84.	en_ZA
dc.identifier.issn	0168-583X (print)
dc.identifier.issn	1872-9584 (online)
dc.identifier.other	10.1016/j.nimb.2015.02.047
dc.identifier.uri	http://hdl.handle.net/2263/50260
dc.language.iso	en	en_ZA
dc.publisher	Elsevier	en_ZA
dc.rights	© 2015 Elsevier B.V. All rights reserved. Notice : this is the author’s version of a work that was accepted for publication in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. A. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 349, pp. 79-84, 2015. doi : 10.1016/j.nimb.2015.02.047.	en_ZA
dc.subject	Thin film	en_ZA
dc.subject	Heavy Ion ERDA	en_ZA
dc.subject	Ion beam damage	en_ZA
dc.subject	Electronic sputtering	en_ZA
dc.subject	Ion beam analysis	en_ZA
dc.subject	Elastic recoil detection analysis (ERDA)	en_ZA
dc.title	Ion beam effects of 26.0 MeV Cu7+ ions in thin metallic and insulating films during heavy ion ERDA measurements	en_ZA
dc.type	Postprint Article	en_ZA