A comparison of basic 94 GHz planar transmission line resonators in commercial BiCMOS back-end-of-line processes

Stander, Tinus

UPSpace Home
→
Engineering, Built Environment and Information Technology
→
Electrical, Electronic and Computer Engineering
→
Conference Papers & Presentations (Electrical, Electronic and Computer Engineering)
→
View Item

dc.contributor.other	International Conference on Actual Problems of Electron Devices Engineering (APEDE), 2014: Saratov
dc.contributor.upauthor	Stander, Tinus
dc.date.accessioned	2015-10-07T06:57:35Z
dc.date.available	2015-10-07T06:57:35Z
dc.date.issued	2014
dc.description	Paper presented at the 2014 International Conference on Actual Problems of Electron Devices Engineering (APEDE), 25-26 Sept. 2014, Saratov.	en_ZA
dc.description.abstract	A comparative simulation study of planar 94 GHz resonators in a typical BiCMOS BEOL stack-up is presented, with the effect of chip passivation included. It is shown that Q-factors of between 3 and 15 can be obtained, depending on transmission medium and ground plane layer choice. Straight half-wavelength and shorted quarter-wavelength microstrip resonators are shown to outperform CPW, GCPW and hairpin resonators, with highest Q-factors obtained where the lowest available metallization layer is used as ground plane. Q-factors of above 10 may also be achieve in the absence of any ground plane in CPW, which may be implemented in processes (such as GaAs or GaN) where multiple metallization layers are not readily available.	en_ZA
dc.description.librarian	hb2015	en_ZA
dc.description.uri	http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=6940442	en_ZA
dc.identifier.citation	Stander, T 2014, 'A comparison of basic 94 GHz planar transmission line resonators in commercial BiCMOS back-end-of-line processes', 2014 International Conference on Actual Problems of Electron Devices Engineering (APEDE), 25-26 Sept. 2014, pp. 185-192.	en_ZA
dc.identifier.isbn	978-1-4799-3437-9
dc.identifier.other	10.1109/APEDE.2014.6958743
dc.identifier.uri	http://hdl.handle.net/2263/50170
dc.language.iso	en	en_ZA
dc.publisher	Institute of Electrical and Electronics Engineers	en_ZA
dc.rights	© 2014 IEEE	en_ZA
dc.subject	Comparative simulation study	en_ZA
dc.subject	Planar 94 GHz resonators	en_ZA
dc.subject	Typical BiCMOS BEOL stack-up	en_ZA
dc.title	A comparison of basic 94 GHz planar transmission line resonators in commercial BiCMOS back-end-of-line processes	en_ZA
dc.type	Presentation	en_ZA