Stander, Tinus; International Conference on Actual Problems of Electron Devices Engineering (APEDE), 2014: Saratov
(Institute of Electrical and Electronics Engineers, 2014)
A comparative simulation study of planar 94 GHz resonators in a typical BiCMOS BEOL stack-up is presented, with the effect of chip passivation included. It is shown that Q-factors of between 3 and 15 can be obtained, ...