Van Laar, Jean H.; Slabber, Johan F.M.; Meyer, Josua P.; Van der Walt, Izak J.; Puts, Gerard Jacob; Crouse, Philippus L.
(Elsevier, 2015-04)
A microwave plasma process operating at atmospheric pressure was developed for the synthesis of SiC nanoparticles. The process utilizes methyltrichlorosilane (MTS) as precursor, acting as both carbon and silicon source, ...